Gas inlet attachment for substrate processing apparatus



FIG. 1 is a front, top and left side perspective view of a gas inletattachment for substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof; and,

FIG. 4 is a left side elevational view thereof;

FIG, 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view take along line 8-8 in Fig.4.

CLAIM I claim the ornamental design for a gas inlet attachment for substrate processing apparatus, as shown and described. 